Facilities
Plasma Reactors
- Plasma Reactor
(Short description)
- Microwave RPECVD Reactor
(Short description)
-
RF Glow Discharge Plasma Reactor
This is a home built 13.56MHz capacitively coupled RF plasma reactor. It consists of a cylindrical borosilicated glass chamber (31 cm length,18 cmdiameter) containing two parallel plate electrodes.Theupper one was powered and the lower acts as a sample holder. The electrode gap is 3 cm, and each electrode diameter is 12 cm. The plasma discharge region is situated between the two Al plates.
Other Facilities
The P2M group uses the facilities available in the Institute of Electronics Microelectronics and Nanotechnology (cf. Photo), and those provided by Lille 1 University and partner laboratories.
- Clean microfabrication room: http://www.iemn.univ-lille1.fr/en/facilities/clean-room/facilities.html
- Characterization center: http://www.iemn.univ-lille1.fr/en/facilities/characterization-center.html
- Common Center
of Cellular Imagery and Microscopy: http://ccmic.univ-lille1.fr//
- Common Center of Spectroscopy: http://lasir.univ-lille1.fr/pages/CCM_infrarouge.html
- Cell culture lab, mass spectrometry and many other facilities are available in partner laboratories